Optimization Tasks in Technology Cad
نویسنده
چکیده
This paper presents new features implemented in the simulation environment VISTA which has been developed in our institute. The basic functionality dealing with the simulation of the manufacturing process and electrical characterization of semiconductor devices was extended by automatic experiment generation, parameter fit and optimization features. An example demonstrates the optimization of the electrical characteristics of vertical double-diffused metal-oxide-semiconductor field-effect transistors using these framework capabilities.
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تاریخ انتشار 2014